טכניון מכון טכנולוגי לישראל
הטכניון מכון טכנולוגי לישראל - בית הספר ללימודי מוסמכים  
M.Sc Thesis
M.Sc StudentBerman Ohad
SubjectProcess Development for a Dielectric Resonator
DepartmentDepartment of Mechanical Engineering
Supervisor Professor David Elata
Full Thesis textFull thesis text - English Version


Abstract

Resonators, utilized as clocks, are widely used in the cellular and communications industry. MEMS-based resonators exhibit many advantages relative to current quartz-crystal technology. At the same time, MEMS resonators present a challenge due to their high electrical resistance and the difficulties in reaching high frequencies. In this research, a Filled Gap Resonator was designed and manufactured in a TowerJazz semiconductor facility. The aim of this research was to investigate physical and electrical properties of the filled gap resonator, as it is produced in a commercial fabrication facility. Design of devices was accomplished using materials and equipment that are compatible with CMOS semiconductor fabrication technology. Manufacturing included the implementation of new process steps and developing a new flow process. Results demonstrated a full release of the device, including electrical response. However, production of functioning devices requires significantly larger resources than were allocated to the presented research. Nevertheless, this research paves the way to the possibility of mass-fabrication compatible devices.