טכניון מכון טכנולוגי לישראל
הטכניון מכון טכנולוגי לישראל - בית הספר ללימודי מוסמכים  
M.Sc Thesis
M.Sc StudentBurman Michael
SubjectInvestigation of Robotic Platforms for Handling of
Microsystems
DepartmentDepartment of Mechanical Engineering
Supervisor Professor Moshe Shoham


Abstract

Miniaturization has been one of the most important technological trends in the last decades. The sizes of microchips have been reduced from centimeters to micrometers and very high component densities have been achieved. Microminiaturization of mechanical components was started from the microfabricated sensors and was followed by microfabricated parts, such as beams and membranes, and microactuators.

Techniques derived from microelectronics procedures enable to manufacture basic elements for Micro Electro Mechanical Systems (MEMS) like actuators, joints gears etc. However, handling and testing of these elements especially during development stage, are problematic due to their miniature size.

Since, the typical dimensions of MEMS range from tens of microns to a few millimeters there is a strong demand for compact highly accurate tools and microsystems to manipulate these elements.

A miniature six degrees-of-freedom robot, based on parallel architecture that is able to manipulate MEMS elements during development stage, has been developed and built.

The development of the parallel robotic structure was based on the iterative process of integration between numerous mathematical robotic structure optimization simulations and the mechanical design of the system, constrained by system initial requirements like system resolution, system dimensions, robotic platform work volume etc., and available market small sized components as actuators, sensors and passive joints. Furthermore, a software program for close loop control of the robotic system was developed.

Preliminary experiment tests of the robot actuators and the robot itself have showed that the developed and constructed robotic system’s characteristics and performance are close to the initial system requirements and could be used for the microsystems manipulation at their development stage.