analysis and modeling methods in micro-systems
micromechanic devices-design and fabric.
microsystems engineering )mems(
mechanics of microsystems
topics: electrostatic-actuation: principles, governing equations, electrostatic
forces, mechanical suspensions, static stability, voltage and charge actuation.
plate actuators, comb drives. actuation with several voltage/charge sources.
solution methods. thermoelastic actuation: principles, governing equations,
thero- electrodynamic stability, static and dynamic actuation.
piezoelectric actuation: principles, governing equations, approximate models.
Created in 19/06/2013 Time 02:39:32