Charchil Building The Graduate School
  Sylabus

principles of micro electromecanical systems (mems) design and production - 036081
  Lecture Tutorial Project/
Seminar 		Laboratory
Weekly
Hours 		2      
Credit
Points
2.0
 

Prerequisites: ( dynamics 034010
and mechanical engineering design 1 034015
and solid mechanics 2 034029 )
Linked Courses: theory of vibration 034011
introduction to integrated sensing syst. 035033
Identical Courses: micromechanic devices-design and fabric. 035021


definition, description and actual status of mems today.
miniaturization and its influence on the mechanical behavior of devices.
micromachining methods and their implementation for fabrication.
introduction to micro mechanics design. integration of sensing and actuation,
combining optics, electronics and reacting materials. using cad packages for
micro electromechanical systems (mems) design. simulation and analysis of
microsystems and packaging principles.

 
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Created in 23/05/2013 Time 04:30:33