M.Sc Thesis


M.Sc StudentMeni Kabla
SubjectEnhanced Piezoelectric Film Properties Using Sol-Gal
Derived PbTiO3 Seed Layers
DepartmentDepartment of Chemical Engineering
Supervisor Full Professors Grader Gideon
Full Thesis textFull thesis text - English Version


Abstract

The influence of a Sol-Gel derived PbTiO3 seed layer on the crystal orientation, ferroelectric, dielectric and piezoelectric properties of a lead zirconium Titanate (PZT, Zr/Ti=52/48) layer was studied. It was found that while direct deposition of PZT onto Pt/Ti/SiO2/Si displayed strong (111) orientation, application of a thin PT seed layer onto Pt/Ti/SiO2/Si enhanced the PZT phase transformation from (111) to (100) preferred orientation.

Ferroelectric, dielectric and piezoelectric properties of the PZT films were evaluated as a function of the PT seed layer thickness and morphology.  Dielectric and ferroelectric properties of the (100) oriented PZT were found to be superior to those of the (111) oriented films. In addition, the piezoelectric coefficient e31,f increased from 9.8C/m2 (without a PT seed layer) to 11.7 C/m2 in the (100) oriented films. The work shows for the first time that an enhancement of the piezoelectric properties can be achieved by PbTiO3 seeding deposited by Sol- Gel instead of sputtering. In addition, for the first time, the relation between Sol-Gel PT seeding thickness and surface coverage on PZT orientation was explored.