Subject: Subject Sylbus: Design and Modeling of Micro-Electro- Mechanical Systems (Mems) - 049016

Design and Modeling of Micro-Electro- Mechanical Systems (Mems) - 049016
Will not be given the year
Credit
Points
2.0
 
  Lecture Exercise Laboratory Project or
Seminar
House
Work
Weekly
Hours
2       4

Determination of the grade according to progress during the semester and a final examination.


Prerequisites: Micro Machining and Micro Electromechanic 046968


Modeling of Mems in the Following Domains: Mechanical (Statics and Dynamics), Thermal, Electro-Optical, Fluidics, Electrostatics and Magnetostatics. Modeling of Noise in Mems: Electrical Noise-Jhonson, G-R, 1/F, Ktc, Thermal-Mechanical Noise and Temperature Noise. Numerical Methods and Mems Modeling by Memscad: Fem, Commercial Packages Such as Memscad. Case Studies of Mems: Cmos Ir Camera, Inertial Sensors, Chemical and Bio-Medical Microsystems. Summary of System Performance Requirements and Figures of Merits.




Textbooks
Compulsory
Book
PublishedPublisherAuthorsBook
Compulsory2000mit press bostons.d. senturiamicrosystem design

Created in 21/01/2018 Time 20:14:53