Subject: Subject Sylbus: Micromachining and Microelectromechanical Systems - 048968

Micromachining and Microelectromechanical Systems - 048968
Will not be given the year
Credit
Points
2.0
 
  Lecture Exercise Laboratory Project or
Seminar
House
Work
Weekly
Hours
2        
Possibility to guided reading

Determination of the grade according to progress during the semester and the submission of the final thesis


Identical Courses: Micro Machining and Micro Electromechanic 046968


Micro Sensors and Measurement Systems - An Overview of Sensors and Actuators, Electronic Components as Sensors, Physics of Micro Scaling, (and Its Effect on Mechanical, Electrostatac, Magnetic and Surface Tension Forces) Principles of Micro Machining (Bulk, Surface) - Cmos Compatible Micro Machnining, Specific Examples: Pressure Sensors, Accelerometers, Infrared Thermal Detectors (System and Fabrication Issues).




Textbooks
PublishedPublisherAuthorsBook
1990elsevier, new yorkf. harashimaintegrated micro-motion systems micromachining,
1982proc. ieeek.e.petersonsilicon as a mechanical material
1992proc. ieeek.e.petersonsilicon as a mechanical material
1989sensors and actuatorsm. parameswarena new approach for the fabrication of micr. struct

Created in 21/01/2018 Time 20:15:08