Subject: Subject Sylbus: Micromachining and Microelectromechanical Systems - 048968

Micromachining and Microelectromechanical Systems - 048968
Will not be given the year
Credit
Points
2.0
 
  Lecture Exercise Laboratory Project or
Seminar
House
Work
Weekly
Hours
2        
Possibility to guided reading

Determination of the grade according to progress during the semester and the submission of the final thesis


Identical Courses: Micro Machining and Micro Electromechanic 046968


MIcro Sensors and Measurement Systems - An Overview of Sensors and Actuators, Electronic Components as Sensors, Physics of Micro Scaling, (and Its Effect on Mechanical, Electrostatac, Magnetic and Surface Tension Forces) Principles of Micro Machining (Bulk,




Textbooks
PublishedPublisherAuthorsBook
1990elsevier, new yorkf. harashimaintegrated micro-motion systems micromachining,
1982proc. ieeek.e.petersonsilicon as a mechanical material
1992proc. ieeek.e.petersonsilicon as a mechanical material
1989sensors and actuatorsm. parameswarena new approach for the fabrication of micr. struct

Created in 23/10/2017 Time 11:03:36