Subject: Subject Sylbus: Micro Machining and Micro Electromechanic - 046968

Micro Machining and Micro Electromechanic - 046968
Credit
Points
3.0
 
Given In
Semester
b
 
  Lecture Exercise Laboratory Project or
Seminar
House
Work
Weekly
Hours
2 1     8

Determination of the grade according to progress during the semester and a final examination.


Identical Courses: Micromachining and Microelectromechanical Systems 048968


M icro Sensors and Measurement Systems - An Overview of Sensors and Actuators, Electronic Components as Sensors, Physics of Micro Scaling, (and Its Effect on Mechanical, Electrostatac, Magnetic and Surface Tension Forces) Principles of Micro Machining (Bulk, Surface) - Cmos Compatible Micro Machnining, Specific Examples: Pressure Sensors, Accelerometers, Infrared Thermal Detectors (System and Fabrication Issues).




System of hours to the semesters
Semester Previous Semester information 02/2016 2016-2017 Spring Semester


Textbooks
PublishedPublisherAuthorsBook
1990elsevier, new yorkf. harashimaintegrated micro-motion systems micromachining,
1982proc. ieeek.e.petersonsilicon as a mechanical material
1992proc. ieeek.e.petersonsilicon as a mechanical material

Created in 21/11/2017 Time 06:13:15