Subject: Subject Sylbus: Micro Machining and Micro Electromechanic - 046968 (Current)

Micro Machining and Micro Electromechanic - 046968
Credit
Points
3.0
Given In
Semester
b
Lecture Exercise Laboratory Project or
Seminar
House
Work
Weekly
Hours
2 1 8

Determination of the grade according to progress during the semester and a final examination.


Identical Courses: Micromachining and Microelectromechanical Systems 048968


Micro Sensors and Measurement Systems - An Overview of Sensors and Actuators, Electronic Components as Sensors, Physics of Micro Scaling, (and Its Effect on Mechanical, Electrostatac, Magnetic and Surface Tension Forces) Principles of Micro Machining (Bulk, Surface) - Cmos Compatible Micro Machnining, Specific Examples: Pressure Sensors, Accelerometers, Infrared Thermal Detectors (System and Fabrication Issues).




Times and places of examinations 02/2017 2017-2018 Spring Semester
examination timedaydateSeason
Monday16.07.2018
Friday05.10.2018

Timetable to semester 02/2017 2017-2018 Spring Semester
RoomBuildingHourdayLecturerExercise
Lecture
no.Registering
Group
12:30-14:30SundayProfessor Emeritus Nemirovsky YaelLecture1011
14:30-15:30SundayExercise11


Textbooks
PublishedPublisherAuthorsBook
1990elsevier, new yorkf. harashimaintegrated micro-motion systems micromachining,
1982proc. ieeek.e.petersonsilicon as a mechanical material
1992proc. ieeek.e.petersonsilicon as a mechanical material

Created in 23/01/2018 Time 09:49:13