Subject: Subject Sylbus: Micro Machining and Micro Electromechanic - 046968

Micro Machining and Micro Electromechanic - 046968
Credit
Points
3.0
 
Given In
Semester
b
 
  Lecture Exercise Laboratory Project or
Seminar
House
Work
Weekly
Hours
2 1     8

Determination of the grade according to progress during the semester and a final examination.


Identical Courses: Micromachining and Microelectromechanical Systems 048968


MIcro Sensors and Measurement Systems - An Overview of Sensors and Actuators, Electronic Components as Sensors, Physics of Micro Scaling, (and Its Effect on Mechanical, Electrostatac, Magnetic and Surface Tension Forces) Principles of Micro Machining (Bulk,




System of hours to the semesters
Semester Previous Semester information 02/2016 2016-2017 Spring Semester


Textbooks
PublishedPublisherAuthorsBook
1990elsevier, new yorkf. harashimaintegrated micro-motion systems micromachining,
1982proc. ieeek.e.petersonsilicon as a mechanical material
1992proc. ieeek.e.petersonsilicon as a mechanical material

Created in 25/09/2017 Time 02:00:19